OPTICAL PROPERTIES OF PECVD DEPOSITED DLC:N FILMS

• Autoři: MURESAN Mihai George; ZAJÍČKOVÁ Lenka; FRANTA Daniel; NEČAS David
• Rok publikování: 2010
• Druh: Konferenční abstrakty
• Fakulta / Pracoviště MU: Přírodovědecká fakulta
• Popis: Amorphous hydrogenated carbon films can be used, besides tribological applications, in photonics. It can include such applications like antireflective coatings, photosensitive materials or thickness monitoring. The optical properties are crucial parameters for these applications, especially possible tuning of refractive index and decrease of absorption in visible. These effects can be achieved by doping with nitrogen. In this contribution, nitrogen doped diamond-like carbon films (DLC:N) were deposited on silicon substrates by plasma enhanced chemical vapor deposition (PECVD) method using a mixture of methane, hydrogen and nitrogen as reactants. Discharge was excited in capacitively coupled configuration at 13.56 MHz. The bias voltage, working pressure and temperature were changed to vary film optical properties. The optical properties of the films were investigated using UV-VIS reflectometry, ellipsometry and FTIR transmittance measurement.

Související projekty

• Studium a aplikace plazmochemických reakcí v neizotermickém nízkoteplotním plazmatu a jeho interakcí s povrchem pevných látek
• Plazmochemické procesy a jejich technologické aplikace