PLASMA-SURFACE INTERACTION EFFECTS DURING ATMOSPHERIC PRESSURE PLASMA MODIFICATION OF SILICON

Warning

This publication doesn't include Faculty of Education. It includes Faculty of Science. Official publication website can be found on muni.cz.

Authors	SKÁCELOVÁ Dana ČECH Jan ČERNÁK Mirko
Year of publication	2014
Type	Conference abstract
MU Faculty or unit	Faculty of Science
Citation
Description	The aim of this work is to study the characterization of plasma-surface interaction of silicon in DCSBD plasma. The influence of the plasma, generated in ambient air on the silicon surface properties with respect to the filamentary nature of DCSBD was studied. Surface properties and chemical composition of silicon were studied by SEM and EDX, respectively. The experimental data were successfully supported by the modeling.