Antireflexní vrstva (SiO2/Al2O3/MgF2) pro dalekou ultrafialovou (FUV, VUV) oblast spektra na vlnové délce 193nm
Title in English | Antireflection coating (SiO2/Al2O3/MgF2) for the far ultraviolet (FUV, VUV) region of the spectrum at the wavelength of 193nm |
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Authors | |
Year of publication | 2014 |
MU Faculty or unit | |
Description | *Triple-layer antireflection coating (SiO2/Al2O3/MgF2) for the far ultraviolet (FUV, VUV) region of the spectrum at the wavelength of 193nm |
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