CHARACTERISATION OF SURFACE AND BULK PROPERTIES OF POLYMER-LIKE THIN FILMS PREPARED USING PECVD ON VARIOUS SUBSTRATES

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Authors

KELAR Lukáš BURŠÍKOVÁ Vilma

Year of publication 2015
Type Article in Proceedings
Conference NanoCon 2015 7th International Conference Papers - Full Texts
MU Faculty or unit

Faculty of Science

Citation
Field Plasma physics
Keywords PECVD polycarbonate glass mechanical properties TDS XPS HMDSZ
Description The aim of the present work was to deposit thin polymer-like films fulfilling several criteria in order to enable their industrial application as protective coatings on various materials, for example plastic substrates. Therefore the films have to be stable, wear resistant with good adherence to the substrate materials and they have to be resistant against mechanical damage. The thin films presented in this work were prepared from mixture of hexamethyldisilazane and nitrogen using plasma enhanced chemical vapor deposition technique.
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