CHARACTERISATION OF SURFACE AND BULK PROPERTIES OF POLYMER-LIKE THIN FILMS PREPARED USING PECVD ON VARIOUS SUBSTRATES
| Authors | |
|---|---|
| Year of publication | 2015 |
| Type | Article in Proceedings |
| Conference | NanoCon 2015 7th International Conference Papers - Full Texts |
| MU Faculty or unit | |
| Citation | |
| Field | Plasma physics |
| Keywords | PECVD polycarbonate glass mechanical properties TDS XPS HMDSZ |
| Description | The aim of the present work was to deposit thin polymer-like films fulfilling several criteria in order to enable their industrial application as protective coatings on various materials, for example plastic substrates. Therefore the films have to be stable, wear resistant with good adherence to the substrate materials and they have to be resistant against mechanical damage. The thin films presented in this work were prepared from mixture of hexamethyldisilazane and nitrogen using plasma enhanced chemical vapor deposition technique. |
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