Observation of cathode voltage and discharge current oscillations and spoke behaviour in HiPIMS

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Authors	KLEIN Peter HNILICA Jaroslav HUBIČKA Zdeněk ČADA Martin VAŠINA Petr
Year of publication	2015
Type	Article in Proceedings
Conference	Book of Contributed Papers
MU Faculty or unit	Faculty of Science
Citation
Web	https://munispace.muni.cz/index.php/munispace/catalog/book/792
Field	Plasma physics
Keywords	HiPIMS; spokes; magnetron sputtering; plasma instabilities
Description	The oscillations were observed on cathode voltage and discharge current temporal evolution in HiPIMS pulse. The frequency of the oscillations depends at given pressure only on actual value of the discharge current. Rotation of the spokes over the cathode and the frequency of the oscillations shows different trends. The oscillations are observed at conditions where at least certain critical amount of spokes emerges.
Related projects:	Porozumění hybridnímu PVD-PECVD procesu s cílem řídit růst nanostrukturovaných kompozitních vrstev Studium impulzních plazmatických systémů k depozici tenkých vrstev pro fotonické aplikace Rozvoj centra pro nízkonákladové plazmové a nanotechnologické povrchové úpravy