Deposition of Hard Yet Moderately Ductile MoBC Coatings by p-DC Magnetron Sputtering

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Authors	SOUČEK Pavel BURŠÍKOVÁ Vilma ZÁBRANSKÝ Lukáš BURŠÍK Jiří VAŠINA Petr
Year of publication	2015
Type	Article in Proceedings
Conference	Potential Application of Plasma and Nanomaterials 2015: Book of Contributed Papers
MU Faculty or unit	Faculty of Science
Citation
Web	https://munispace.muni.cz/index.php/munispace/catalog/book/792
Field	Plasma physics
Keywords	magnetron sputtering; ion flux; nanolaminates; Mo2BC
Description	Novel nanolaminated MoBC coatings were prepared using a combination of non-reactive direct current and pulsed direct current magnetron sputtering. Depending on the deposition conditions the coatings were either of amorphous or of nanocomposite nature. Nanocomposite coatings showed good hardness and Young’s modulus and showed no tendency to form cracks even for high-load nanoindentation testing.
Related projects:	CEPLANT - Regionální VaV centrum pro nízkonákladové plazmové a nanotechnologické povrchové úpravy Lokální mikrostrukturní změny vyvolané statickou a dynamickou indentací nanostrukturovaných a nanolaminovaných povlaků Rozvoj centra pro nízkonákladové plazmové a nanotechnologické povrchové úpravy