Diffuse Coplanar Surface Barrier Discharge: Influence of Gas Humidity on Plasma Parameters
| Authors | |
|---|---|
| Year of publication | 2015 |
| Type | Article in Periodical |
| Magazine / Source | Plasma Physics and Technology |
| MU Faculty or unit | |
| Citation | |
| Field | Plasma physics |
| Keywords | DCSBD; barrier discharge; atmospheric pressure; humidity; pattern; OES |
| Description | It was found that the working gas humidity influences substantially the parameters of diffuse coplanar surface barrier discharge. The absolute humidity of air or N2 has a strong influence on the discharge pattern and its macroscopic homogeneity. The amount of H2O in working gas influences also generated radicals and the plasma chemistry. We suggest that the humidity of working gas should be a controlled parameter of in-line atmospheric pressure plasma treatment under real industrial conditions. |
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