Ellipsometry of surface layers on a 1-kg sphere from natural silicon
| Authors | |
|---|---|
| Year of publication | 2017 |
| Type | Article in Periodical |
| Magazine / Source | Applied Surface Science |
| MU Faculty or unit | |
| Citation | |
| Doi | http://dx.doi.org/10.1016/j.apsusc.2016.08.135 |
| Field | Solid matter physics and magnetism |
| Keywords | Silicon; Surface layers; Ellipsometry; 1-kg mass standard |
| Description | We have investigated surface layers on a monocrystalline float-zone, n-type ( 2400-2990 Ohm.cm) sphere with the diameter of 93.6004 mm. Ellipsometric spectra in the visible-ultraviolet range reveals the presence of thin layers of amorphous Si as well as oxide overlayer. We have also prepared a series of flat Si samples, polished using slurries with 1-6 mu m grits; the overlayers were examined by mid-infrared ellipsometry, including the range of polar vibrations of the Si O bonds. AFM measurements on the sphere were used to test the models of its surface. (C) 2016 Elsevier B.V. All rights reserved. |
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