Structural and Ferromagnetic Properties of Sputtered FeCoB/AlN Soft Magnetic Multilayers for GHz Applications
Authors | |
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Year of publication | 2017 |
Type | Article in Periodical |
Magazine / Source | IEEE TRANSACTIONS ON MAGNETICS |
MU Faculty or unit | |
Citation | |
web | http://ieeexplore.ieee.org/abstract/document/7924320/ |
Doi | http://dx.doi.org/10.1109/TMAG.2017.2703175 |
Field | Solid matter physics and magnetism |
Keywords | FeCoB; high-frequency permeability; magnetic multilayers; magnetron sputtering; soft magnetic materials |
Description | In this paper, we studied the structural and magnetic properties of amorphous FeCoB/AlN multilayered thin films with in-plane uniaxial magnetic anisotropy based on the Fe-28% Co-20% B (at. %) alloy, deposited on 8 '' Si/200 nm-thermal-SiO2 wafers in an industrial, high-throughput magnetron sputtering system. |
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