Numerical enhancements of the microwave resonant cavity method for plasma diagnostics

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Authors

FALTÝNEK Jan KUDRLE Vít TESAŘ Jakub VOLFOVÁ Martina TÁLSKÝ Antonín

Year of publication 2019
Type Article in Periodical
Magazine / Source PLASMA SOURCES SCIENCE & TECHNOLOGY
MU Faculty or unit

Faculty of Science

Citation
Web https://iopscience.iop.org/article/10.1088/1361-6595/ab4300/meta
Doi http://dx.doi.org/10.1088/1361-6595/ab4300
Keywords numerical model; resonator; microwave; plasma diagnostics; plasma density; discharge profile; mode stability
Description Microwave resonator method is a well established and sensitive technique of plasma density measurements, especially in low pressure plasmas. The traditional Slater approximation of very small electromagnetic field perturbation is extended and corrected by a more accurate, yet relatively simple numerical model, also addressing further phenomena such as the resonator eigenmodes and the stability of the dominant mode. The presence of a discharge tube is found to be a main source of deviation from the Slater approximation. The pre-calculated numerical correction factors are directly applicable for a range of cavity and discharge tube geometries.
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