Multi-component (Al,Cr,Nb,Y,Zr)N thinfilms by reactive magnetron sputter deposition for increased hardness and corrosion resistance

Warning

This publication doesn't include Faculty of Education. It includes Faculty of Science. Official publication website can be found on muni.cz.
Authors

VON FIEANDT Kristina PASCHALIDOU Eirini-Maria SRINATH Aishwarya SOUČEK Pavel RIEKEHR Lars NYHOLM Leif LEWIN Erik

Year of publication 2020
Type Article in Periodical
Magazine / Source Thin Solid Films
MU Faculty or unit

Faculty of Science

Citation
Web https://www.sciencedirect.com/science/article/pii/S0040609019307126
Doi http://dx.doi.org/10.1016/j.tsf.2019.137685
Keywords Multi-principal element nitrideNitride coatingHigh entropy nitridePotentiodynamic polarisation curves
Description Multi-component nitride thin films in the Al–Cr–Nb–Y–Zr system with non-equimolar composition have been deposited by reactive dc magnetron sputtering. The substrate temperature and substrate bias have been varied, from room temperature to 700°C and from 0 to -200 V, respectively. The relationship between these varied growth conditions on the structure, morphology, mechanical and corrosion properties of the films have been probed. All films consisted of a single solid solution with a NaCl-type structure, as shown by X-ray diffraction. However, elemental energy dispersive spectroscopy maps, obtained in the scanning transmission electron microscope, indicated that there could be partial segregation of Al, Cr and Y atoms within the grains. The microstructure of the films became denser, more fine-grained and smoother as the bias and temperature were increased. Nanoindentation showed that the hardness of the films increased with both bias and temperature, reaching a maximum of 27 GPa. The corrosion resistance of the films, studied by performing potentiodynamic polarisation curves in 1 M HCl, was also found to be improved when compared to a commercially available hyper-duplex stainless steel and a ternary reference (Nb,Zr)N thin film as well.
Related projects:

You are running an old browser version. We recommend updating your browser to its latest version.