Deposition and characterization of organosilicon thin films from TEOS+O2 gas mixture

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Authors

JANČA Jan KRYŠTOF P. NAVRÁTIL Karel BOCHNÍČEK Zdeněk NĚMEC Petr

Year of publication 1995
Type Article in Periodical
Magazine / Source Acta Physica Univesitatis Comenianae
MU Faculty or unit

Faculty of Science

Citation
Field Plasma physics
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