Effects of DC bias on the PECVD deposition of thin films from octamethylcyclotetrasiloxane (OMTS) and oxygen mixtures

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Authors

ZAJÍČKOVÁ Lenka KRZYŽÁNKOVÁ Michaela JANČA Jan

Year of publication 1995
Type Article in Proceedings
Conference Proceedings of 17th Symposium on Plasma Physics and Technology
MU Faculty or unit

Faculty of Science

Citation
Field Plasma physics
Description Effects of DC bias on the PECVD deposition of thin films from octamethylcyclotetrasiloxane (OMTS) and oxygen mixtures
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