Kinetika reakcí plynné fáze O_2+TEOS v řízeném rf reaktoru s elektronovou spinovou rezonancí

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Title in English Kinetics of O_2 + TEOS gas-phase chemical reactions in remote RF plasma reactor with electron spin resonance
Authors

JANČA Jan TÁLSKÝ Antonín ZVONÍČEK Vilém

Year of publication 1996
Type Article in Periodical
Magazine / Source Plasma Chemistry and Plasma Processing
MU Faculty or unit

Faculty of Science

Citation
Field Plasma physics
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