Depozice a charakterizace tenkých BN vrstev v dusíkovém mikrovlnném a čpavkovém dohasínajícím výboji

Warning

This publication doesn't include Faculty of Education. It includes Faculty of Science. Official publication website can be found on muni.cz.
Title in English Deposition and characterization of BN thin films in microwave N2 and NH3 afterglow
Authors

ELIÁŠ Marek JANČA Jan

Year of publication 1997
Type Chapter of a book
MU Faculty or unit

Faculty of Science

Citation
Related projects:

You are running an old browser version. We recommend updating your browser to its latest version.