Technological application and spectral diagnostics of rf discharges

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Authors	MAŠEK Jaroslav BRABLEC Antonín BRABLEC Antonín
Year of publication	1997
Type	Article in Proceedings
Conference	Plasma physics and plasma technology
MU Faculty or unit	Faculty of Science
Citation
Field	Plasma physics
Keywords	plasma discharges; spectral diagnostics
Related projects:	Study of plasmachemical reactions in non-isothermic low pressure plasma and its interaction with the surface of solid substrates