Influence of discharge and substrate parameters on PECVD of TEOS/argon mixtures

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Authors

ZAJÍČKOVÁ Lenka BURŠÍKOVÁ Vilma JANČA Jan

Year of publication 1997
Type Article in Proceedings
Conference ICPIG XXIII
MU Faculty or unit

Faculty of Science

Citation
Field Plasma physics
Description Influence of discharge and substrate parameters on PECVD of TEOS/argon mixtures
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