Ellipsometry of thin films

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Authors	OHLÍDAL Ivan FRANTA Daniel
Year of publication	1998
Type	Article in Periodical
Magazine / Source	Acta Physica Slovaca
MU Faculty or unit	Faculty of Science
Citation
Web	http://hydra.physics.muni.cz/~franta/bib/APS48_459.html
Field	Solid matter physics and magnetism
Description	In this paper a brief review of ellipsometric methods is presented for analyzing thin films. Examples of using these methods will be introduced as well. By means of results obtained using the ellipsometric methods introduced their practical meaning will be illustrated. It will be shown that the ellipsometric method can be tilized for analyzing single layers and multilayer systems in it successful way.
Related projects:	Common laboratories for applied plasma physics and plasma chemistry in PřF and PedF MU, VA Brno and ÚFP AV ČR in Prague Characterization of multilayer systems with randomly rough boundaries by means of optical and X - ray methods