Ellipsometry of thin films

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Authors

OHLÍDAL Ivan FRANTA Daniel

Year of publication 1998
Type Article in Periodical
Magazine / Source Acta Physica Slovaca
MU Faculty or unit

Faculty of Science

Citation
Web http://hydra.physics.muni.cz/~franta/bib/APS48_459.html
Field Solid matter physics and magnetism
Description In this paper a brief review of ellipsometric methods is presented for analyzing thin films. Examples of using these methods will be introduced as well. By means of results obtained using the ellipsometric methods introduced their practical meaning will be illustrated. It will be shown that the ellipsometric method can be tilized for analyzing single layers and multilayer systems in it successful way.
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