Metastability of Phosphorus or Boron doped a-Si:H films

Authors

SŤAHEL Pavel SLÁDEK Petr ROCA I CABARROCAS Pere THEYE Marie-Luce

Year of publication 1998
Type Article in Proceedings
Conference MRS 1998 Spring Meeting,
MU Faculty or unit

Faculty of Education

Citation
Field Solid matter physics and magnetism
Keywords metastability; doped a-Si:H

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