RF discharges at atmospheric pressure

Warning

This publication doesn't include Faculty of Education. It includes Faculty of Science. Official publication website can be found on muni.cz.

Authors	BRABLEC Antonín KAPIČKA Vratislav ONDRÁČEK Zdeněk SLAVÍČEK Pavel STŘECHA Milan ŠŤASTNÝ František VACULÍK Robert ŠÍCHA Miloš
Year of publication	1999
Type	Article in Periodical
Magazine / Source	Czech. Journal of Phys.
MU Faculty or unit	Faculty of Science
Citation
Field	Plasma physics
Keywords	plasma physics; RF discharges; optical diagnostics
Description	The experiments with RF discharge showed that it could reoresent a usefull tool for the plasma - aided surface treatment technology. In the contribution basic properties of the discharge are presented.
Related projects:	Theoretical and experimental study of low temperature non-equilibrium plasma of HF discharges in mixture of air and water vapour Study of plasmachemical reactions in non-isothermic low pressure plasma and its interaction with the surface of solid substrates