Deposits from Hexamethyldisiloxane in a Dielectric Barrier Discharge at Atmospheric Pressure

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Authors

SONNENFELD Axel TUN T. M. ZAJÍČKOVÁ Lenka WAGNER Hans-Erich BEHNKE J. F. HIPPLER R.

Year of publication 2000
Type Article in Proceedings
Conference Proceedings of HAKONE VII
MU Faculty or unit

Faculty of Science

Citation
Field Plasma physics
Description Deposits from Hexamethyldisiloxane in a Dielectric Barrier Discharge at Atmospheric Pressure
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