Plazmová depozice ochranných vrstev na bázi uhlíku

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Title in English PECVD of protection coatings containing carbon
Authors

DVOŘÁK Pavel ZAJÍČKOVÁ Lenka BURŠÍKOVÁ Vilma

Year of publication 1999
Type Article in Proceedings
Conference Materiálové vědy na prahu 3. milénia
MU Faculty or unit

Faculty of Science

Citation
Field Plasma physics
Keywords PECVD; carbon; DLC; DLC:Si
Description Carbon films were deposited in capacitively coupled rf glow discharge from several different mixtures on silicon substrates. We compared optical properties in UV-VIS range of diamond like films deposited from mixture of methane and argon with these for carbon films deposited from HMDSO/methane and HMDSO/methane/Ar feeds.
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