Plazmová depozice ochranných vrstev na bázi uhlíku

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Title in English	PECVD of protection coatings containing carbon
Authors	DVOŘÁK Pavel ZAJÍČKOVÁ Lenka BURŠÍKOVÁ Vilma
Year of publication	1999
Type	Article in Proceedings
Conference	Materiálové vědy na prahu 3. milénia
MU Faculty or unit	Faculty of Science
Citation
Field	Plasma physics
Keywords	PECVD; carbon; DLC; DLC:Si
Description	Carbon films were deposited in capacitively coupled rf glow discharge from several different mixtures on silicon substrates. We compared optical properties in UV-VIS range of diamond like films deposited from mixture of methane and argon with these for carbon films deposited from HMDSO/methane and HMDSO/methane/Ar feeds.
Related projects:	Common laboratories for applied plasma physics and plasma chemistry in PřF and PedF MU, VA Brno and ÚFP AV ČR in Prague Hard and superhard coatings prepared by unconventional plasma processes