Optical Properties of Si Incorporated Diamond-like Carbon Films Deposited by RF PECVD
| Authors | |
|---|---|
| Year of publication | 2001 |
| Type | Article in Proceedings |
| Conference | JUNIORMAT 01 |
| MU Faculty or unit | |
| Citation | |
| Field | Plasma physics |
| Keywords | Diamond-like carbon; PECVD; Ellipsometry |
| Description | Silicon incorporated diamond-like films were deposited by 13.56 MHz rf PECVD and the optical properties of the films were examined by the ellipsometric method. Various mixtures of methane and hexamethyldisiloxane (HMDSO) were used as reaction gases for deposition. The dependencies of the refraction and absorption indices on deposition conditions were studied. |
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