Temperature dependence of mechanical properties of DLC/Si protective coatings prepared by PECVD

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Authors

BURŠÍKOVÁ Vilma NAVRÁTIL Vladislav ZAJÍČKOVÁ Lenka JANČA Jan

Year of publication 2002
Type Article in Periodical
Magazine / Source Materials Science and Engineering A
MU Faculty or unit

Faculty of Science

Citation
Field Plasma physics
Keywords Temperature dependence; mechanical properties; DLC; PECVD
Description The mechanical properties of hard protective DLC/Si films deposited by PECVD from Ar-CH4-HMDSO mixture have been analyzed using microindentation techniques as the main characterisation tool. The formation and development of crack lines and patterns have been studied to determine fracture toughness of the film and of the interface as a function of temperature.
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