Rf sputtering of composite SiOx/plasma polymer films and their basic properties

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Authors

CHOUKOUROV A. PIHOSH Y. STELMASHUK V. BIEDERMAN Hynek SLAVÍNSKÁ D. KORMUNDA M. ZAJÍČKOVÁ Lenka

Year of publication 2002
Type Article in Periodical
Magazine / Source Surface & coatings technology
MU Faculty or unit

Faculty of Science

Citation
Field Plasma physics
Keywords Rf magnetron; sputtering; SiOx; plasma polymer films
Description Rf sputtering of composite SiOx/plasma polymer films and their basic properties
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