Simultaneous plasmachemical reduction of mixed tungsten and titanion precursors
Authors | |
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Year of publication | 2002 |
Type | Article in Periodical |
Magazine / Source | Czech. Jourmal of Physics |
MU Faculty or unit | |
Citation | |
Field | Plasma physics |
Keywords | tungsten; titaniun; plasma; ICP |
Description | Simultaneous plasmachemical reduction of mixed tungsten and titanion precursors |
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