Mode Transition in Low-pressure RF Capacitive Discharge in Nitrogen

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Authors

DVOŘÁK Pavel ZAJÍČKOVÁ Lenka

Year of publication 2002
Type Article in Proceedings
Conference Europhysics Conference Abstracts 26B
MU Faculty or unit

Faculty of Science

Citation
Field Plasma physics
Keywords discharge modes plasma nitrogen
Description Two different plasma modes of capacitive coupled rf discharge in pure nitrogen were studied. the modes differed significantly in a visual appearance, plasma potential and in the shape of the electron energy distribution function. For the plasma diagnostics we used Langmuir probe, Plasma Process Monitor, optical emission spectroscopy and we carried out electrical measurements on reactor with the discharge.
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