Film deposition in Parallel Plate RF Discharges Containing Hydrocarbons

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Authors	BIBINOV Nikita KUDRLE Vít ZAJÍČKOVÁ Lenka DONKO Zoltan WIESEMANN Klaus
Year of publication	2003
Type	Article in Proceedings
Conference	Proceedings of ISPC 14
MU Faculty or unit	Faculty of Science
Citation
Field	Plasma physics
Keywords	PECVD; negative ions; acethylene
Description	Film deposition in Paralle Plate RF Discharges Containing Hydrocarbons
Related projects:	Study of plasmachemical processes using microwave and optical spectroscopy Study of plasmachemical reactions in non-isothermic low pressure plasma and its interaction with the surface of solid substrates