Film deposition in Parallel Plate RF Discharges Containing Hydrocarbons

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Authors

BIBINOV Nikita KUDRLE Vít ZAJÍČKOVÁ Lenka DONKO Zoltan WIESEMANN Klaus

Year of publication 2003
Type Article in Proceedings
Conference Proceedings of ISPC 14
MU Faculty or unit

Faculty of Science

Citation
Field Plasma physics
Keywords PECVD; negative ions; acethylene
Description Film deposition in Paralle Plate RF Discharges Containing Hydrocarbons
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