Aberration integrals for the low-voltage foil corrector

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Authors

AKEN Rogier van LENC Michal BARTH James

Year of publication 2004
Type Article in Periodical
Magazine / Source Nuclear Instruments & Methods in Physics Research A
MU Faculty or unit

Faculty of Science

Citation
Field Theoretical physics
Keywords Spherical aberration; Aberration integrals; Electron microscopy
Description The theory for the calculation of the aberrations of the low-voltage foil corrector is developed.
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