Optical emission spectroscopy of argon plasma generated by surfatron at frequency 2.45 GHz

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Authors

STRAŇÁK Vítězslav CIUPINA V. NAVRÁTIL Zdeněk MUSA G. SLAVÍČEK Pavel VLADOIU R. ŠPATENKA Petr TICHÝ Milan TRUNEC David

Year of publication 2004
Type Article in Proceedings
Conference Proceedings of the 17th Escampig 2004
MU Faculty or unit

Faculty of Science

Citation
Field Plasma physics
Keywords surfatron plasma; argon; optical emission spectroscopy
Description The paper presents results of optical emission spectroscopy study of surfatron-based argon plasma. Plasma is formed in quartz tube, which is placed in the surfatron cavity powered by a microwave magnetron generator working with frequency 2.45 GHz. The plasma inside the tube is sustained downstream by a surface wave, which propagates along the plasma column. The quartz nozzle ends in a vacuum chamber pumped by a rotary oil pump. The pressure inside the chamber as well as the flow rate of the working gas is independently variable. We estimated plasma parameters as rotational and vibrational temperature from the measured spectra of OH and N2.
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