Energy distribution functions of ions impinging on substrate in microwave plasma

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Authors	MEŠKO Marcel CICMAN Peter OHTSU Y. FUJITA H. KUDRLE Vít
Year of publication	2004
Type	Article in Periodical
Magazine / Source	Journal of physics D: Applied physics
MU Faculty or unit	Faculty of Science
Citation
Field	Plasma physics
Keywords	IEDF; large area microwave plasma; sheath
Attached files	d4_3_022.pdf
Description	Using retarding field energy analyser, we measured ion energy distribution function of positive ions impinging on substrate in microwave plasma
Related projects:	Study of plasmachemical reactions in non-isothermic low pressure plasma and its interaction with the surface of solid substrates