Energy Spectra of Ions in the Hydrogen Capacitively Coupled Low-Pressure Discharge

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Authors	DVOŘÁK Pavel JÁNSKÝ Jaroslav ZAJÍČKOVÁ Lenka JANČA Jan
Year of publication	2005
Type	Article in Proceedings
Conference	SAPP XV - Book of contributed papers
MU Faculty or unit	Faculty of Science
Citation
Field	Plasma physics
Keywords	IEDF hydrogen capacitive plasma low-pressure
Description	The IEDFs of ions flowing from hydrogen asymmetric capacitively coupled low-pressure discharge were measured. The dependencies of their shapes and integrals on the measurement position are presented.
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