Infrared Absorption Spectroscopy of Oxygen Precipitates in Czochralski Silicon

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Authors

ŠTOUDEK Richard HUMLÍČEK Josef

Year of publication 2004
Type Article in Proceedings
Conference WDS'04 Proceedings of Contributed Papers
MU Faculty or unit

Faculty of Science

Citation
Field Solid matter physics and magnetism
Keywords Infrared; Silicon; Oxygen; Precipitates
Description We have analysed infrared transmittance spectra of Czochralski silicon. Using measurements at liquid nitrogen temperature we have identified the contribution of oxygen precipitates. The continuum theory of average dielectric constant has been used to determine the shape and volume fraction of these particles.
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