Project of a clean room laboratory for silicon device technology at the Masaryk University

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Authors

MIKULÍK Petr

Year of publication 2004
Type Article in Proceedings
Conference Proceedings of International Conference Silicon-2004
MU Faculty or unit

Faculty of Science

Citation
Field Solid matter physics and magnetism
Keywords clean room; silicon; chip
Description The paper presents ideas, motivation and plans the the projection of a clean room laboratory for silicon device technology at the Masaryk University.
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