Complex study of the mechanical properties of a-Si:H and a-SiC:H thin films

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Authors	BURŠÍKOVÁ Vilma SLÁDEK Petr SŤAHEL Pavel BURŠÍK Jiří
Year of publication	2005
Type	Article in Proceedings
Conference	Book of abstract - ICANS 21
MU Faculty or unit	Faculty of Science
Citation
Field	Solid matter physics and magnetism
Keywords	amorphous semiconductor; mechanical properties; thin film
Description	The aim of this study is to provide the complex study of the mechanical properties of a-SiH and a-SiC:H thin films prepared under different plasma conditions.
Related projects:	Study and application of plasma chemical reactions in non-isothermic low temperature plasma and its interaction with solid surface Multiscale approach to relationships between mechanical and microstructural characteristics of materials