Influence of silicon, oxygen and nitrogen admixtures on the properies of plasma deposited amorphous diamond-like carbon coating

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Authors

BURŠÍKOVÁ Vilma ZAJÍČKOVÁ Lenka DVOŘÁK Pavel FRANTA Daniel PEŘINA Vratislav JANČA Jan

Year of publication 2005
Type Article in Proceedings
Conference International Conference ELMECO-5, Book of Abstracts
MU Faculty or unit

Faculty of Science

Citation
Field Plasma physics
Keywords DLC; protective coatings; PECVD
Description Modification of DLC coatings with silicon, oxygen and nitrogen admixtures, enhancement of mechanical properties,
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