Influence of silicon, oxygen and nitrogen admixtures on the properies of plasma deposited amorphous diamond-like carbon coating

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Authors	BURŠÍKOVÁ Vilma ZAJÍČKOVÁ Lenka DVOŘÁK Pavel FRANTA Daniel PEŘINA Vratislav JANČA Jan
Year of publication	2005
Type	Article in Proceedings
Conference	International Conference ELMECO-5, Book of Abstracts
MU Faculty or unit	Faculty of Science
Citation
Field	Plasma physics
Keywords	DLC; protective coatings; PECVD
Description	Modification of DLC coatings with silicon, oxygen and nitrogen admixtures, enhancement of mechanical properties,
Related projects:	Multiscale approach to relationships between mechanical and microstructural characteristics of materials Study of plasmachemical reactions in non-isothermic low pressure plasma and its interaction with the surface of solid substrates