Planar UV excilamp excited by a surface barrier discharge
| Authors | |
|---|---|
| Year of publication | 2005 |
| Type | Article in Periodical |
| Magazine / Source | Journal of physics D: Applied physics |
| MU Faculty or unit | |
| Citation | |
| Field | Plasma physics |
| Keywords | surface barrier discharge; excimer radiation; plasma sources |
| Description | In the contribution, typical characteristics of planar excilamp based on KrCl* and XeCl* exciplex molecules are presented. The excitation of working mixture Kr/Xe/Cl2 is realized by means of the surface barrier discharge at pressures of 0.1 - 1 bars. They were measured and discussed spectra emitted by the plasma in UV/VIS/NIR spectral range, intensity of emitted light vs. total pressure in the discharge and a composition of the working mixture, power of emitted light, resp. The radiation power vs. input electric power, space distribution of emitted light including basic electrical parameters of the discharge were also measured. It was shown that characteristic power of UV radiation emitted in the spectral range 200 - 400 nm is about 6 mW/cm2 while the efficiency could be about 8 %. |
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