Study of the mechanical properties of thin films using combined nanoindentation and AFM measurements

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Authors	BURŠÍKOVÁ Vilma KLAPETEK Petr BOUSQUET Angelique ELIÁŠ Marek
Year of publication	2005
Type	Article in Periodical
Magazine / Source	Jemná mechanika a optika
MU Faculty or unit	Faculty of Science
Citation
Field	Solid matter physics and magnetism
Keywords	nanoindentation; AFM; thin films; mechanical properties
Description	Study of the mechanical properties of thin films prepared by PECVD using combined nanoindentation and AFM measurements.
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