Spectroscopic analysis of a pulsed magnetron discharge

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Authors

VAŠINA Petr MEŠKO Marcel IMBERT Jean-Christophe DE POUCQUES Ludovic TEULÉ-GAY Lionel BOISSE-LAPORTE Caroline BRETAGNE Jean PAGNON Daniel TOUZEAU Michel GANCIU Mihai

Year of publication 2005
Type Article in Periodical
Magazine / Source Journal of Optoelectronics and Advanced Materials
MU Faculty or unit

Faculty of Science

Citation
Field Plasma physics
Keywords pulsed magnetron; spatially resolved diagnostics; time resolved diagnostics; transport processes; preionisation
Description To investigate the generation and transport of ions during and after a high power current pulse applied on magnetron cathode, we performed spectroscopic measurements with time and space resolution. The microwave antennas placed between target and substrate ensure proper conditions of current pulse development, ion transport and., by re-exciting sputtered species, allows spectroscopic emission measurements of species transported towards the substrate. Measured data are presented and discussed.
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