REFRACTORY METAL FILM DEPOSITION BY THERMIONIC VACUUM ARC METHOD

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Authors

MUSA G. MUSTATA I. LUNGU C.P. SURDU BOB C. VLADOIU R. BURŠÍKOVÁ Vilma

Year of publication 2005
Type Article in Proceedings
Conference 17th ISPC
MU Faculty or unit

Faculty of Science

Citation
Field Plasma physics
Keywords REFRACTORY METAL; FILM DEPOSITION; THERMIONIC VACUUM ARC METHOD
Description REFRACTORY METAL FILM DEPOSITION BY THERMIONIC VACUUM ARC METHOD
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