Plasma Enchanced CVD of Carbon Nanotubes in Atmosferic Pressure Microwave Torch
| Authors | |
|---|---|
| Year of publication | 2005 |
| Type | Article in Proceedings |
| Conference | Proceedings of 15th Symposion on Application of Plasma Processes |
| MU Faculty or unit | |
| Citation | |
| Field | Plasma physics |
| Keywords | carbon nanotubes; microwave discharge; scanning electron microscopy |
| Description | In present paper we describe a synthesis of carbon nanotubes in microwave plasma torch at atmospheric pressure from the mixture of methane, hydrogen and argon on Si/SiO2/Fe substrate. Using this relatively novel method and under optimized conditions pure, well aligned and long nanotubes were grown with high deposition rate. The layers were analyzed by scanning electron microscopy and discharge plasma was analyzed by optical emission spectroscopy. |
| Related projects: |