Plasma Enchanced CVD of Carbon Nanotubes in Atmosferic Pressure Microwave Torch

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Authors

JAŠEK Ondřej ELIÁŠ Marek BUBLAN Martin KUDRLE Vít ZAJÍČKOVÁ Lenka MATĚJKOVÁ Jiřina REK Antonín BURŠÍK Jiří KADLĚČÍKOVÁ Magdaléna

Year of publication 2005
Type Article in Proceedings
Conference Proceedings of 15th Symposion on Application of Plasma Processes
MU Faculty or unit

Faculty of Science

Citation
Field Plasma physics
Keywords carbon nanotubes; microwave discharge; scanning electron microscopy
Description In present paper we describe a synthesis of carbon nanotubes in microwave plasma torch at atmospheric pressure from the mixture of methane, hydrogen and argon on Si/SiO2/Fe substrate. Using this relatively novel method and under optimized conditions pure, well aligned and long nanotubes were grown with high deposition rate. The layers were analyzed by scanning electron microscopy and discharge plasma was analyzed by optical emission spectroscopy.
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