Mechanical properties of amorphous and nanocrystalline silicon thin films on flexible substrates

Authors

BURŠÍKOVÁ Vilma SLÁDEK Petr SŤAHEL Pavel

Year of publication 2005
Type Article in Proceedings
Conference NENAMAT International Conference Proceedings NANO05
MU Faculty or unit

Faculty of Education

Citation
Field Solid matter physics and magnetism
Keywords Mechanical properties; Amorphous silicon; Nanocrystalline Silicon
Description The objective of our study was to investigate the mechanical properties of amorphous and nanocrystalline silicon thin layer deposited on flexible sustrates by means of depth sensing intendation method.
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