Mechanical properties of nanostructured composite diamond films prepared by PECVD enhanced by RF induced DC self bias

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Authors	BURŠÍKOVÁ Vilma FRGALA Zdeněk BURŠÍK Jiří JAŠEK Ondřej ZAJÍČKOVÁ Lenka KARÁSKOVÁ Monika MATĚJKOVÁ Jiřina REK Antonín FRANTA Daniel KLAPETEK Petr
Year of publication	2006
Type	Article in Proceedings
Conference	E-MRS 2006 Fall meeting
MU Faculty or unit	Faculty of Science
Citation
Field	Plasma physics
Keywords	nanostructures; composites; diamond films; PECVD; RF induced DC self bias voltage
Description	Mechanical properties of nanostructured composite diamond films prepatred by PECVD enhanced by RF induced DC self bias
Related projects:	Synthesis of carbon micro- and nanostructures by plasma technologies Multiscale approach to relationships between mechanical and microstructural characteristics of materials