Complex study of mechanical properties of a-Si : H and a-SiC : H boron doped films

Warning

This publication doesn't include Faculty of Education. It includes Faculty of Science. Official publication website can be found on muni.cz.

Authors	BURŠÍKOVÁ Vilma SLÁDEK Petr SŤAHEL Pavel BURŠÍK Jiří
Year of publication	2006
Type	Article in Periodical
Magazine / Source	Journal of Non-Crystalline Solids
MU Faculty or unit	Faculty of Science
Citation
Field	Solid matter physics and magnetism
Keywords	Complex study of mechanical properties of a-Si : H and a-SiC : H boron doped films
Description	In the paper we present a complex study of mechanical properties of a-Si : H and a-SiC : H boron doped films.
Related projects:	Study and application of plasma chemical reactions in non-isothermic low temperature plasma and its interaction with solid surface Multiscale approach to relationships between mechanical and microstructural characteristics of materials