Carbon nanotubes synthesized by plasma enhanced CVD: Preparation of measurement of their electrical properties

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Authors

KUČEROVÁ Zuzana ZAJÍČKOVÁ Lenka ELIÁŠ Marek JAŠEK Ondřej FICEK Richard VRBA Radimir MATĚJKA František MATĚJKOVÁ Jiřina KLAPETEK Petr BURŠÍK Jiří

Year of publication 2006
Type Article in Periodical
Magazine / Source Czechoslovak Journal of Physics
MU Faculty or unit

Faculty of Science

Citation
Field Plasma physics
Keywords PECVD; Carbon nanotubes; electrical properties
Description Carbon nanotubes (CNTs) were synthesized in atmospheric pressure microwave plasma torch in the mixture of argon, methane and hydrogen on the silicon substrate with SiO2 overlayer and a thin top iron layer serving as a catalyst. This deposition technique is quite unique because of its simplicity and high CNT growth rate but it is still under investigation as concern its reproducibility. CNTs were deposited with the future prospect of their applications or further characterization that might require CNTs in the form of suspension or powder. One of the research directions includes measurements of CNT electrical properties such as their current-voltage (I-V) characteristics. Preparation of solutions with well dispersed CNTs was studied using various liquids (distilled water, ethyl alcohol) and ultrasonication. Dried drops of these solutions were investigated by scanning electron microscopy (SEM) and atomic force microscopy (AFM) in order to assess CNT appearance and dispersion. For the electrical measurement chips with gold electrodes were prepared by electron lithography. CNTs were placed on the chips by dropping their solution and the I-V characteristics may be measured by contacting the electrodes bridged by CNTs.
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