Silicon-oxide Containing Diamond-like Carbon Coatings Prepared Using Plasma Enhanced Chemical Vapor Deposition

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Authors	BURŠÍKOVÁ Vilma DVOŘÁK Pavel ZAJÍČKOVÁ Lenka FRANTA Daniel JANČA Jan BURŠÍK Jiří BLÁHOVÁ O. PEŘINA V. KLAPETEK P.
Year of publication	2006
Type	Article in Proceedings
Conference	Application of Nanocrystalline Diamond and Diamond Like Carbon Materials
MU Faculty or unit	Faculty of Science
Citation
Field	Plasma physics
Keywords	PECVD; DLC; mechanical properties; adhesion; thermal stability
Description	Silicon-oxide Containing Diamond-like Carbon Coatings Prepared Using Plasma Enhanced Chemical Vapor Deposition
Related projects:	Study and application of plasma chemical reactions in non-isothermic low temperature plasma and its interaction with solid surface Multiscale approach to relationships between mechanical and microstructural characteristics of materials