Optical emission spectroscopy of microwave plasma torch during deposition of carbon nanotubes

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Authors

ELIÁŠ Marek JAŠEK Ondřej ZAJÍČKOVÁ Lenka FRGALA Zdeněk KUDRLE Vít

Year of publication 2006
Type Article in Proceedings
Conference In Abstracts of Invited Lectures and Contributed Papers, XVth Europhysics Conference on Atomic and Molecular Physics of Ionized Gases
MU Faculty or unit

Faculty of Science

Citation
Field Plasma physics
Keywords carbon-nanotubes-deposition-optical-emission-spectroscopy
Description We perfomed the ptical emission spectroscopy of microwave plasma torch during the process of plasmachemical deposition of carbon nanotubes.
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