Towards limits of x-ray specular reflectivity

Investor logo

Warning

This publication doesn't include Faculty of Education. It includes Faculty of Science. Official publication website can be found on muni.cz.
Authors

JÍŠA Jan MEDUŇA Mojmír

Year of publication 2009
Type Article in Periodical
Magazine / Source Materials Structure in Chemistry, Biology, Physics and Technology
MU Faculty or unit

Faculty of Science

Citation
Field Solid matter physics and magnetism
Keywords x-ray reflectivity; fourier transform; photoresist
Description Using the high resolution diffractometer we have successfully measured photoresist layers more than 1 um thick by x-rays. The thicknesses obtained by x-ray reflectivity correspond well to the ones obtained by optical reflection.
Related projects:

You are running an old browser version. We recommend updating your browser to its latest version.