Investigation of silicon surface wettability after plasma treatment

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Authors	SKÁCELOVÁ Dana SŤAHEL Pavel HANIČINEC Martin ČERNÁK Mirko
Year of publication	2010
Type	Article in Proceedings
Conference	HAKONE XII Contributed paper
MU Faculty or unit	Faculty of Science
Citation
Field	Plasma physics
Keywords	Diffuse coplanar DBD, silicon, plasma treatment
Description	In this contribution the influence of the plasma on crystalline Si (100) surface was studied. Dielectric barrier discharge the so called Diffuse Coplanar Surface Barrier Discharge (DCSBD) to plasma modification was used. The silicon surface modification after plasma treatment was investigated by AFM and contact angle measurement. Different way to clean the surface is reflected on the surface wettability after plasma treatment and the ageing effect of treated surface was studied too.
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