Characterization of ultrananocrystalline diamond thin films using low energy scanning electron microscopy

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Authors

ŠPERKA Jiří ZAJÍČKOVÁ Lenka JAŠEK Ondřej DVOŘÁK Pavel MIKMEKOVÁ Šárka SCHÄFER Jan

Year of publication 2011
Type Conference abstract
MU Faculty or unit

Faculty of Science

Citation
Description This paper deals with the low energy scanning electron microscopy characterization of ultrananocrystalline diamond films. These films were prepared by plasma enhanced chemical vapor deposition (PECVD) using dual frequency discharge.
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